Improvement in 193 nm Photoresists Performance by 172 nm VUV Curing
نویسندگان
چکیده
منابع مشابه
DNA damage induced by 193-nm radiation in mammalian cells.
The contribution of DNA damage to the effects of 193-nm excimer laser radiation on mammalian cells in culture was studied in order to evaluate the mutagenic potential of this UV wavelength in vivo. Two approaches were taken: measurement of pyrimidine dimer-specific endonuclease-sensitive sites/megabase and comparison of the 193-nm radiation-induced cytotoxicity in normal versus DNA repair-defic...
متن کاملDNA Damage Induced by 193-nm Radiation in Mammalian Cells1
The contribution of DNA damage to the effects of 193-nm excimer laser radiation on mammalian cells in culture was studied in order to evaluate the mutagenic potential of this IV wavelength in vivo. Two approaches were taken: measurement of pyrimidine dimer-specific endonuclease-sensitive sites/megabase and comparison of the 193-nm ra diation-induced cytotoxicity in normal versus DNA repair-defi...
متن کاملPhotodissociation of propargyl chloride at 193 nm.
The photodissociation of propargyl chloride (C3H3Cl) has been studied at 193 nm. Ion imaging experiments with state-selective detection of the Cl atoms and single-photon ionization of the C3H3 radicals were performed, along with measurements of the Cl + C3H3 and HCl + C3H2 recoil kinetic energy distributions, using a scattering apparatus with electron bombardment ionization detection to resolve...
متن کاملPhotodissociation dynamics of ClN3 at 193 nm.
Photofragment translational spectroscopy was used to identify the primary and secondary reaction pathways in 193 nm photodissociation of chlorine azide (ClN(3)) under collision-free conditions. Both the molecular elimination (NCl+N(2)) and the radical bond rupture channel (Cl+N(3)) were investigated and compared with earlier results at 248 nm. The radical channel strongly dominates, just as at ...
متن کاملMeasurements of detector nonlinearity at 193 nm.
We have developed a measurement system based on a correlation method to characterize the nonlinearity of a detector's response over a large range of laser pulse energy. The system consists of an excimer-laser source, beam-shaping optics, a beam splitter, a monitor detector, a set of optical filters, and the detector under test. Detector nonlinearities as large as 10% or greater over an entire m...
متن کاملذخیره در منابع من
با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید
ژورنال
عنوان ژورنال: Journal of Photopolymer Science and Technology
سال: 2003
ISSN: 0914-9244,1349-6336
DOI: 10.2494/photopolymer.16.511